{ "ok": true, "doi": "10.46243/jstj.2018.v3.i3.235", "doi_display": "10.46243/jstj.2018.v3.i3.235", "doi_url": "https://doi.org/10.46243/jstj.2018.v3.i3.235", "state": "registered", "url": "https://www.jst.org.in/index.php/pub/article/view/235", "title": "An Overview Of Micro Electro Mechanical Systems And Challenges Of MEMS", "version": 2, "registered_via": "crossref", "prefix": { "prefix": "10.46243", "status": "live" }, "registrant": { "name": "Longman Publishers", "kind": "publisher", "country": "India" }, "reserved_at": null, "registered_at": "2026-09-29 22:00:37", "updated_at": "2026-09-29 23:59:57", "withdrawn_at": null, "withdrawn_reason": null, "record": { "format": "smartscholars-doi-metadata/1.0", "doi": "10.46243/jstj.2018.v3.i3.235", "referent": "Creation", "type": "JournalArticle", "structural_type": "Digital", "modes": [ "Visual" ], "characters": [ "Language" ], "titles": [ { "value": "An Overview Of Micro Electro Mechanical Systems And Challenges Of MEMS", "type": "PrincipalTitle", "lang": "en" } ], "identifiers": [ { "type": "DOI", "value": "10.46243/jstj.2018.v3.i3.235" } ], "agents": [ { "role": "author", "name": { "given": "S.Madhava", "family": "Reddy" }, "sequence": "first" }, { "role": "author", "name": { "given": "J Pavan", "family": "kumar" }, "sequence": "additional" }, { "role": "author", "name": { "given": "K.Sudhakar", "family": "Reddy" }, "sequence": "additional" }, { "role": "publisher", "name": { "org": "Longman Publishers" } } ], "dates": { "published": "2018-05-25", "date_type": "PublicationDate", "online": "2018-05-25" }, "language": "en", "container": { "type": "Journal", "titles": [ { "value": "Journal of Science & Technology", "type": "PrincipalTitle" } ], "identifiers": [ { "type": "ISSN", "value": "2456-5660", "medium": "electronic" } ], "volume": "03", "issue": "03", "pages": { "first": "50", "last": "57" } }, "links": [ { "url": "https://www.jst.org.in/index.php/pub/article/view/235", "return_type": "text/html", "primary": true }, { "url": "https://www.jst.org.in/index.php/pub/article/download/235/206", "purpose": "text-mining", "return_type": "application/pdf" }, { "url": "https://www.jst.org.in/index.php/pub/article/download/235/3638", "purpose": "text-mining", "return_type": "application/xml" }, { "url": "https://www.jst.org.in/index.php/pub/article/view/235/206", "purpose": "similarity-checking" } ], "abstract": { "value": "Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements that are made using the techniques of micro fabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters. Likewise, the types of MEMS devices can vary from relatively simple structures having no moving elements, to extremely complex electromechanical systems with multiple moving elements under the control of integrated microelectronics. The one main criterion of MEMS is that there are at least some elements having some sort of mechanical functionality whether or not these elements can move. The term used to define MEMS varies in different parts of the world. In the United States they are predominantly called MEMS, while in some other parts of the world they are called “Microsystems Technology” or “micro machined devices”. This report deals with the field of micro-electromechanical systems or MEMS. MEMS encompass the process-based technologies used to fabricate tiny integrated devices and systems that integrate functionalities from different physical domains into one device. Such devices are fabricated using a wide range of technologies having in common the ability to create structures with micro-scale and even nano scale accuracies. The products range in size from a few microns to millimeters. These devices have the ability to sense, control and actuate on the micro scaleand generate effects on the macroscale.", "lang": "en" }, "license": { "url": "https://creativecommons.org/licenses/by/4.0/", "start": "2018-05-25", "applies_to": "vor" }, "references": [ { "key": "ref1", "unstructured": "MEMS by N.P.Mahalik Tata McGraw-Hill Education Pvt. Ltd 2007" }, { "key": "ref2", "unstructured": "MEMS and Microsystems by Tai-Ran Hsu Tata McGraw-Hill Education Pvt. Ltd., 2002" }, { "key": "ref3", "unstructured": "Scaling issues and Design of MEMS by S.Bagilo, S.Castorina & N.Sivalli" }, { "key": "ref4", "unstructured": "Nexus Market Analysis for MEMS and Microsystems III, 2005-2009" }, { "key": "ref5", "unstructured": "Think Small!, issue 2, volume 2, July 2007, Wicht Technologie Consulting" }, { "key": "ref6", "unstructured": "Lab-on-Chip and Microfluidics Technologies' Capability to Reduce Costs and Time-to-Market Drive Uptake in Drug Development and Clinical Diagnostics, Frost & Sullivan, July 2007" }, { "key": "ref7", "unstructured": "Foundries for MST/MEMS–Worldwide-, November 2006 enablingMNT, www.enablingMNT.com" }, { "key": "ref8", "doi": "10.1109/iedm.1995.499295", "unstructured": "Smith, J.H. et. al., Embedded Micromechanical Devices for the Monolithic Integration of MEMS with CMOS, Proc. 1995 IEDM, pp. 609-612" }, { "key": "ref9", "unstructured": "Rewards and Risks of Moving into New Applications: Case Study Accelerometers, Henne van Heeren, Jeremie Bouchaud, Richard Dixon and Patric Salomon, MSTnews, February 2007" }, { "key": "ref10", "unstructured": "2005 Electromechanical Switches–Global Market Demand Analysis. www.vdc-corp.com" }, { "key": "ref11", "unstructured": "Emerging Markets for Microfluidic Applications, Yole Developpement, June 2007" }, { "key": "ref12", "unstructured": "MEMS in Medicine, Ken Gilleo, www.et-trends.com" }, { "key": "ref13", "doi": "10.1109/2.895117", "unstructured": "Diagnostic Report 2007, Cambridge Consultants, www.cambridgeconsultants.com B. 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Pister. “Emerging Challenges: Mobile Networking for „Smart Dust‟”, June 2000" } ], "record": { "registrant": "Longman Publishers", "registered": "2026-09-08", "updated": "2026-09-20", "issue_number": 1, "source": "crossref-api", "source_agency": "Crossref (member 25296)" } }, "record_sha256": "4bae2fb9365ff58c8ba3f672204c17a1c1407b41e45cde26fb976e3c5480baf9", "handle": { "synced_at": "2026-10-01 18:13:36", "url": "https://www.jst.org.in/index.php/pub/article/view/235" }, "links": { "record_page": "https://registry.smartscholars.in/record.php?doi=10.46243%2Fjstj.2018.v3.i3.235", "system_metadata": "https://registry.smartscholars.in/resolve.php?doi=10.46243%2Fjstj.2018.v3.i3.235&as=system", "history": "https://registry.smartscholars.in/api.php?action=history&doi=10.46243%2Fjstj.2018.v3.i3.235", "kernel_xml": "https://registry.smartscholars.in/resolve.php?doi=10.46243%2Fjstj.2018.v3.i3.235&as=xml" } }